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真空金屬鍍膜 |超硬鍍膜 |光學鍍膜 |Plasma treatment |Vacuum Components
Hollow cathode
plasma source
Ion beam source
High vacuum
angle valves
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Vacuum Components

High vacuum angle valves

HV angle valves are preferably employed as the main valve between the vacuum chamber and the high vacuum generator. In very large vacuum systems the nominal sizes 320 and 400 are also used as by-pass valves.

 

Various versions are available:

  • Stainless steel or mild steel housing, lacquered
  • Valve plate always stainless steel
  • VITON or rubber gaskets
  • Connections for by-pass line and measurement technology
 
 
Angle valves DN 400, DN 500, DN 630:

By means of a pneumatic cylinder a tilting movement is transferred to the valve plate via an elastomerically sealed rotary motion feed through. The tilting movement is preceded by a brief parallel stroke. The opening position of the valve plate secures optimal conductance. This version is particularly suitable for employment as main valve.

Main characteristics: VTD Vakuumtechnik Dresden GmbH - Willkommen
Nominal valve widths   DN 400 DN 500 DN 630
Molecular conductance 1000 l/s 12 15 18
Leakage rate
(He leak test)
mbar l/s <10-8
Mass kg ca. 170 ca. 215 ca. 260
Distance
Flange axle
mm 320 350 430
Total height mm 649 735 870
Total depth mm 838 950 1 067
Total width mm 604 730 841
Connection suction side ISO-K
Connection pressure side ISO-F

Angle valves DN 320H, DN 400H

By means of a pneumatic cylinder a tilting movement is transferred to the valve plate via an elastomerically sealed rotary motion feed through. The tilting movement is preceded by a brief parallel stroke. The opening position of the valve plate secures optimal conductance. This version is particularly suitable for employment as by-pass valve.

 

Main characteristics: VTD Vakuumtechnik Dresden GmbH - Willkommen
Nominal valve widths   DN 320H DN 400H
Molecular conductance 1000 l/s ca. 8 ca. 12
Leakage rate
(He leak test)
mbar l/s <10-8
Mass kg ca. 120 ca. 170
Distance
Flange axle
mm 250 320
Total height mm 849 959
Total depth mm 515 633
Valve diameter mm 440 542
Connection suction side ISO-K
Connection pressure side ISO-K

 
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