Principle
Vacuum arc discharge between a round
target (diameter 65) switched as cathode and an anode, which can
also be the plant mass, whereby the basic point of the discharge
explosively evaporates and ionises the target material. The
target is eroded through the very fast random movement of the
cathode spot.
Special feature
In contrast to other
evaporation processes the coating material thus eroded is
largely ionised and hits the substrates with high energy. This
source enables very high target utilisation even without costly
magnetic field management or control.
Arc evaporator source
AS 65
